KLA-Tencor Surfscan 6200 (SFS6200)

Description

KLA-Tencor Surfscan 6200 (SFS6200)
Wafer Surface Contamination Analysis System
The SFS6200 tool is used for wafer surface contamination analysis of unpatterned semiconductor wafers.
Condition: Refurbished, Operational, Calibrated & Tested
Warranty: 90 Days
Country of origin: USA
Manufacturer: KLA-Tencor
Specifications
• Substrate Sizes: 50mm(2"), 76mm(3"), 100mm(4"), 125mm(5"), 150mm(6"), 200mm(8") wafers
• Substrate Material: Silicon or any opaque, polished surface which scatters less than 5% of incident light.
• Defect Sensitivity: 0.10µm diameter PSL sphere equivalent with greater than 90% capture rate.
• Haze Sensitivity: 0.02ppm
• Haze Resolution: 0.002ppm
• Repeatability: 0.5% at 1σ (mean count greater than 500, 0.364 µm diameter latex spheres)
• Accuracy: ≥99% (verified with VLSI Standards)
• Dynamic Range: 0.01µm to 9,999µm in a single measurement.
• Throughput: Up to 100 w/hr using 150mm wafers
• Cassette Handling: Single puck wafer handling from two cassette (one sender/receiver, one receiver)
• Illumination Source: 30mW Argon-Ion laser, 488nm wavelength
• Operator Interface: New LCD monitor, keyboard, mouse
• Color coded defect maps, histograms, magnified views of individual defects.
• Operation System and Software: Windows 98, ver. 4.2
• Manual
Quality Control
• The SFS6200 is calibrated and tested.
Physical Characteristics
• Instrument Dimensions: Height: 168 cm (66”) Width: 75 cm (29.5”) Depth: 77 cm (30.25”)
• Instrument Weight: 240 kg (530 lbs)
• Crate Dimensions: Height 196 cm (77”) Width: 112 cm (44”) Depth: 122 cm (48”)
• Crate Weight: 460 kg (1010 lbs)
Installation Requirements
• Vacuum: 508 mm (20 in.) Hg
• Electrical: 220-240V, 50/60 Hz
• Power Requirement: 2 kVA
• Ducted Venting: Two 102 mm (4”) exhaust hoses
• Environment: Class 10 or better
Purchase:
To purchase, please click the “Buy It Now” button.
Follow to the next page for payment instructions.
Payment:
Click the “Pay Now” button at the top of the E-Bay page to proceed with the checkout and payment process.
Payment must be made within 3 days of purchase.
Accepted Forms of Payment:
We accept PayPal and direct Bank to Bank Wire Transfers.
When paying via PayPal, payments must include your shipping address and should be submitted via the E-bay payment process. When paying via wire transfer, please contact us for the Invoice with wire transfer instructions.
Sales Tax:
For California customers, sales tax 9.75% is added and depends upon your location.
If you are tax exempt, please provide a copy of your Tax Exempt Certificate prior to check out.
Please do not send payment before receiving a revised invoice.
Shipping Terms:
(EXW) Ex-Works San Francisco, California, USA
Shipping rates are the responsibility of the customer and are not refundable.
Rates include handling, packaging materials, label scanning and tracking information.
Shipping rates are based upon the weight and dimensions of the package/crates and your location.
Please contact us prior to shipment.
Local Pick Up:
Local pick up is available.
Please contact us to arrange a pick up.
International Shipping:
International shipping is determined on a case by case basis.
We reserve the right to refuse shipment to certain locations/customers if all our requirements are not met.
All documentation and customs reports are to be prepared by the purchasing party and provided prior to pick up.
48 Hour notice is a minimum required notice prior to International pick up. Insurance is required on all International orders.
Please note, these products are subject to export restrictions under U.S. law. The Bureaus of U.S. Census and the
Bureau of Industry and Security
(BIS) regulate exports through the
Export Administration Regulations
(EAR). We DO NOT sell any items to any locations in Country Group E. In order to comply with export control laws established by the US Department of Commerce and the US Department of State, we require a written statement defining the ultimate End User, the End Use of each product to be exported and the buyers agreement to comply with the
Export Administration Regulations
(EAR). You will be contacted via email with the appropriate documents that will need to be returned to us in order to complete your order, please be advised that we cannot complete your order if you do not provide all of the data requirements.
International Orders are subject to duties, taxes or other Import Fees; the bidder/buyer is solely responsible for these fees, documents and transportation if held at a customs office in the destination country. In the event that you have questions about international shipping logistics please contact us before purchase.
Inquiries:
Please contact us with any questions you have.
While we are closed over the weekend, we will make every effort to answer your questions as soon as possible.
Most questions are answered in less than 24 hours.
Installation:
Professional installation service is available upon request at additional cost. Please contact us if you need installation and we’ll include it in the Invoice.
Training:
Basic maintenance and operation training is available upon request at additional cost. Please contact us if you need training and we’ll include it in the Invoice.
Warranty:
90 days after shipment date, counting for labor and parts. Consumable parts and tear and wear parts are excluded from this warranty. Buyer is responsible for defective item shipping costs. Upon receipt of the defective unit we will fully test the item in question, visually inspect the condition and verify the serial numbers, after this process we’ll ship new or repaired unit for replacement. If the state of the item is not as was described in the listing, we reserve the right to refuse refund/exchange.
If it is evident the item was damaged due to improper installation or use, we reserve the right to refuse refund/exchange. We will not honor claims for any items which were uninsured and damaged during shipment. In case service engineer assistance is required during the warranty period, travel expenses, board and lodging will be charged at actual cost.
30 Days Return/Cancellation Policy:
If you are not completely satisfied with your purchase and would like to cancel your purchase, please contact us within 30 days of your purchase and we will refund 80% of your purchase price minus 20% restocking fee. All items must be returned in the same condition if they left our facility/warehouse.
It is required that original packaging materials be retained and returned with the product.
If the item has been changed or tampered in any way from original condition, we reserve the right to refuse refund.
Upon receipt of the unit we will fully inspect the condition, test it and verify the serial numbers.
If the state of the item is not as was described in the listing, we reserve the right to refuse refund.
If it is evident the item was damaged due to improper installation or use, we reserve the right to refuse refund.
All returned shipments should be properly insured.
We will not honor claims for any items which were uninsured and damaged during shipment. Buyer is responsible for return item shipping costs.
Note:
Some auction pictures may be representational only.
For any additional questions, tool pictures and details, please contact Semiphoton, Inc. sales team
.
Business Hours: 9am - 5pm (PST) Monday - Friday
Warehouse Delivery Hours: 9am - 3pm
(PST) Monday - Friday
We are closed on Weekends and all major US holidays